Hybrid seals

A hybrid seal is a combination of a magnetic fluid seal, a weld metal bellows, and a rotary joint. The combination achieves compact design and improved maintainability.

This compact, highly-maintainable product is supplied by EAGLE INDUSTRY, which has some of the leading mechanical seal technology in the world. It combines a magnetic fluid seal, a weld metal bellows produced by using its special welding technology, and a rotary joint having high sealing performance.

The hybrid seal is used as a dust seal for hard disk drive manufacturing equipment, which must be operated in a clean environment, and as a vacuum seal of semiconductor manufacturing equipment or liquid-crystal display manufacturing equipment.